MEMS Sensors
Technology Overview
SMIC's MEMS solutions currently focus on two mainstream technology platforms. The first platform is a MEMS Microphone with an "open" device that has already entered mass production. The second platform is a CMOS-MEMS integrated with a"sealed"device, an Inertial sensor, which started production in 2Q16.
Features
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MEMS Microphone Platform
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Inertial Platform
Process Modules
Application Usage
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Sisonic
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Accelerometer
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Gyroscope
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Pressure Sensor
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Microscope
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Ultrasonic Sensor
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RF Devices
Downloads
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SMIC Brochure
Download
Other Pages Of Specialty Technology
Other Pages Of Technology
