MEMS
MEMS Sensors
Technology Overview
SMIC's MEMS solutions currently focus on two mainstream technology platforms. The first platform is a MEMS Microphone with an "open" device that has already entered mass production. The second platform is a CMOS-MEMS integrated with a"sealed"device, an Inertial sensor, which started production in 2Q16.
Features
MEMS Microphone Platform
Inertial Platform
Process Modules
Application Usage
Sisonic
Accelerometer
Gyroscope
Pressure Sensor
Microscope
Ultrasonic Sensor
RF Devices
Other Pages Of Specialty Technology
Other Pages Of Technology