マスクサービス

マスクサービス

MICのマスクショップは、ファンドリーのお客様や他のファブ、そして研究機関のためにマスク製造サービスを行っております。このマスクショップは、現在、中国で最大で且つ最先端のマスク製造設備を有し、0.5μmから28nmレベルの対応が可能です。最先端の装置を持ち、光近接効果補正によるバイナリーマスクや位相シフトマスクを提供しております。g線、i線、DUV、そしてAfTステッパーならびにスキャナー向けに、5"×5"ならびに 6"×6"レチクル両方をご利用いただけます。


In-House Service Benefits

Customers utilizing SMIC mask services as part of a turnkey solution can enjoy benefits such as a shorter cycle time from tape-out to wafer start, reduced risk of reticle damage during transportation, increased flexibility of services and cost savings. In addition, they can benefit from the convenience of online mask data review and job deck view services.

Mask Operation Quality

Stringent quality control at our mask operation, coupled with our strong technology development team, enables us to produce masks under tight critical dimensions with low defect rates. Each mask set is recorded in our mask status tracking system and vigilantly monitored to ensure delivery of quality reticles. Regular checks help to detect and prevent ESD damage, scratches, particles, pellicle frames and aging.

Mask Operation Security

SMIC's mask operation exercises tight security control to ensure protection of our customers' intellectual property (IP). A secure and access-controlled mask operation production environment is backed by tight mask operation network and protected behind an isolated and dedicated mask operation firewall. Data and network security measures include the following:

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