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Foundry Solutions Overview
• Advanced Logic
• 28nm MPW & Offering
• 28nm IP & Service
• 40nm
• 65nm/55nm
• Mature Logic
• 90nm, 0.13/0.11µm, 0.18µm,   0.25µm, 0.35µm
• eNVM
• Mixed Signal & RF
• Analog & Power
• Display Driver IC (DDIC)
• CMOS Image Sensor (CIS)
• Non-Volatile Memory (NVM)
• IoT Solutions
Turnkey Services
Fab Information
Mask Services
Multi-Project Wafer Service
Lab Services
24hrs Technical Support
MEMS Sensors

SMIC’s MEMS solutions currently focus on two mainstream technology platforms. The 1st platform is MEMS Microphone with “opening” device and has entered mass production already. The 2nd platform is Inertial MEMS with “sealed” device and has started risk production in 2Q16. The main key features for each are listed in below.

MEMS Microphone Platform:
  • High quality membrane process
  • Cr/Au metallization
  • High quality sacrificial release
  • Thin/Ultrathin wafer handling (400~300μm ->~250μm)
Inertial MEMS Platform:
  • CMOS/MEMS Monolithic solution
  • Via_Mid TSV/WLP
  • CMOS Compatible process
  • Full IP protection

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