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Foundry Solutions Overview
Technology
• Advanced Logic
• 28nm MPW & Offering
• 28nm IP & Service
• 40nm
• 65nm/55nm
• Mature Logic
• SPOCULL
• 90nm, 0.13/0.11µm, 0.15µm,   0.18µm, 0.25µm, 0.35µm
• eNVM
• Mixed Signal & RF
• Analog & Power
• IGBT
• Display Driver IC (DDIC)
• CMOS Image Sensor (CIS)
• MEMS
• Non-Volatile Memory (NVM)
• IoT Solutions
• Automotive
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MEMS Sensors

SMIC’s MEMS solutions currently focus on two mainstream technology platforms. The 1st platform is a MEMS Microphone with an “opening” device that has entered mass production already. The 2nd platform is Inertial MEMS with a “sealed” device and has started risk production in 2Q16. The main key features for each are listed in below.

MEMS Microphone Platform:
  • High quality membrane process
  • Cr/Au metallization
  • High quality sacrificial release
  • Thin/Ultrathin wafer handling (400~300μm ->~250μm)
Inertial MEMS Platform:
  • CMOS/MEMS Monolithic solution
  • Via_Mid TSV/WLP
  • CMOS Compatible process
  • Full IP protection



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