MEMS

MEMS Sensors

Technology Overview

SMIC's MEMS solutions currently focus on two mainstream technology platforms. The first platform is a MEMS Microphone with an "open" device that has already entered mass production. The second platform is a CMOS-MEMS integrated with a"sealed"device, an Inertial sensor, which started production in 2Q16.

Features

  • MEMS Microphone Platform

  • Inertial Platform

Process Modules

Application Usage

  • Sisonic

  • Accelerometer

  • Gyroscope

  • Pressure Sensor

  • Microscope

  • Ultrasonic Sensor

  • RF Devices

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